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High precision thickness measurements using tactile probes

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Agenda

In this webinar, you will gain insight into the problem of high-precision thickness measurement of extended objects with tactile gauge heads.

As usual, our SIOS experts have prepared both theoretical expertise and practical application examples for you.

Starting with a description of typical influences and contributions to measurement uncertainty, we will, among other things.

  • different device principles of tactile thickness measurement are compared,
  • the interferometric tactile gauges LM 20 and LM 50 from SIOS and their advantages over other high-precision gauges are explained,
  • application examples for high-precision thickness measurements such as the SIOS gauge block comparator, the lens and wafer thickness measuring station are shown, as well as
  • possibilities of upgrading an existing length and thickness measurement setup with interferometers will be presented. 

At the end, our speakers will answer questions from the live webinar chat.


Speaker: Wolfram Meyer, Michael Kühnel

Language: English

Recording from: March 08, 2022

Time: 50 min

Presenter

Mr Dipl.-Ing. Wolfram Meyer

Presenter

Mr Dr.-Ing. Michael Kühnel

F& E / Projektleitung // Project Manager R&D