High precision thickness measurements using tactile probes

Room type


This field is required.
This field is required.
This field is required.
This field is required.
This field is required.
This field is required.
This field is required.
Required fields
If you have already registered and can't locate your registration confirmation email, click here!
The email address is incorrect. Please double-check your email address.

A confirmation email with logging details has been sent to the provided email.

System configuration test. Click here!


In this webinar, you will gain insight into the problem of high-precision thickness measurement of extended objects with tactile gauge heads.

As usual, our SIOS experts have prepared both theoretical expertise and practical application examples for you.

Starting with a description of typical influences and contributions to measurement uncertainty, we will, among other things.

  • different device principles of tactile thickness measurement are compared,
  • the interferometric tactile gauges LM 20 and LM 50 from SIOS and their advantages over other high-precision gauges are explained,
  • application examples for high-precision thickness measurements such as the SIOS gauge block comparator, the lens and wafer thickness measuring station are shown, as well as
  • possibilities of upgrading an existing length and thickness measurement setup with interferometers will be presented. 

At the end, our speakers will answer questions from the live webinar chat.

Speaker: Wolfram Meyer, Michael Kühnel

Language: English

Recording from: March 08, 2022

Time: 50 min

Mr Dipl.-Ing. Wolfram Meyer

Mr Dr.-Ing. Michael Kühnel

F& E / Projektleitung // Project Manager R&D